Line Cut Profile
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Leveling & Z Reference
Z Offset
Zero Z Reference (pick from image)
Surface Leveling (fit to BG pixels)
Background Roughness
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Background Warpage
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Bump Coplanarity
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Bump Volume
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Bump Warpage
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Spec Limits
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Bump Height Map
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Drop Bruker .asc / .txt file here

WLI Bump Height Analyzer — Help

Surface Analysis

All analyses are recomputed automatically whenever parameters change. Results are shown in the Analysis tab.

Background Roughness

Computed from all pixels in the selected background region (height range or ROI). Characterises the surface texture of the substrate.

RaArithmetic mean roughness: Ra = (1/N) Σ |zᵢ − z̄|
RqRMS roughness: Rq = √[(1/N) Σ (zᵢ − z̄)²]
RzPeak-to-valley height: Rz = z_max − z_min
RpMaximum peak above mean: Rp = z_max − z̄
RvMaximum valley below mean: Rv = z̄ − z_min

Background Warpage

Fits a best-fit plane z = Ax + By + C to all background pixels using their (x, y, z) positions. Quantifies the global tilt and bow of the substrate.

BG WarpagePeak-to-valley of the fitted plane evaluated over the background pixels: max(Ax+By+C) − min(Ax+By+C). Represents the total height variation attributable to substrate tilt/bow.
Tilt X / YSlope coefficients A, B converted to mrad: Tilt = (A or B) / pixel_size_µm. Tells you how many milliradians the substrate is tilted in each direction.
Residual Ra / RqRoughness computed on the residuals zᵢ − (Axᵢ + Byᵢ + C): the true surface texture after removing the tilt component. More meaningful than raw Ra when significant tilt is present.

Bump Coplanarity

For each bump ROI, the mean Z value of all pixels inside the ROI is computed. Coplanarity is the peak-to-valley of these per-ROI means:

Coplanarity = max(mean_ROI) − min(mean_ROI)

A low coplanarity means all bumps are at a similar height (good for bonding uniformity). Requires ≥2 ROIs.

Bump Warpage

Fits a best-fit plane z = Ax + By + C through the centers of bump ROIs (using each ROI's mean height as z). The warpage is the peak-to-valley range of the fitted plane evaluated at those centers:

Warpage = max(A·xᵢ + B·yᵢ + C) − min(A·xᵢ + B·yᵢ + C)

Warpage differs from coplanarity: coplanarity is the raw spread of bump heights; warpage isolates the global bow component by fitting a plane first. Requires ≥3 ROIs.

Bump Volume

Estimates the material volume of each bump above the background mean:

V_bump = Σ (zᵢ − z̄_bg) · pixel_area   [for zᵢ > z̄_bg]
V_air  = Σ (z_max_bump − zᵢ) · pixel_area

pixel_area = (pixel_size in µm)². Both per-bump and total volumes are reported in µm³.

Statistics Panel

HistogramDistribution of bump ROI mean heights (red) and background pixel heights (blue) on the same axis
StatsPer-pixel µ/σ across all bump ROI pixels; per-ROI mean µ/σ; background µ/σ and pixel count
ΔHeightEach bump mean minus background mean: µ, σ, min, max of the height difference distribution